Kinetics of field induced oxidation of hydrogen terminated Si(111) by means of a scanning force micoscope

Journal article

Publication Details

Author(s): Ley L, Hundhausen M
Journal: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Publication year: 1996
Volume: 14
Pages range: 2845
ISSN: 0734-211X

FAU Authors / FAU Editors

Hundhausen, Martin apl. Prof. Dr.
Lehrstuhl für Laserphysik
Ley, Lothar Prof. Dr.
Naturwissenschaftliche Fakultät

Last updated on 2018-07-08 at 15:08