Development of the interferometrical scanning probe microscope - art. no. 629311
Vorbringer-Dorozhovets N, Hausotte T, Hofmann N, Manske E, Jäger G (2006)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2006
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 6293
Pages Range: 29311-29311
DOI: 10.1117/12.680692
Abstract
This article shows the basic SPM principle as well as the addition of a cantilever position detection system. This system has been realized with a special interferometer with a quadrant diode to detect the cantilever torsion and bending. The measuring beam is focused on the cantilever backside using a lens. The reflected laser beam is split and evaluated; one part of the beam is used for the interferometrical position measurement with the other part focused onto a quadrant diode. Due to the structure of the interferometrical SPM, it can be installed in many different positioning systems with large measuring ranges, including a nanopositioning and nanomeasuring machine (NPM machine), developed at the Institute of Process Measurement and Sensor Technology of the Technische Universitat Ilmenau.
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Germany (DE)How to cite
APA:
Vorbringer-Dorozhovets, N., Hausotte, T., Hofmann, N., Manske, E., & Jäger, G. (2006). Development of the interferometrical scanning probe microscope - art. no. 629311. (pp. 29311-29311). International Society for Optical Engineering; 1999.
MLA:
Vorbringer-Dorozhovets, Nataliya, et al. "Development of the interferometrical scanning probe microscope - art. no. 629311." International Society for Optical Engineering; 1999, 2006. 29311-29311.
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