Metrological scanning probe microscope - art. no. 61880L
Vorbringer-Dorozhovets N, Hausotte T, Manske E, Jäger G, Hofmann N (2006)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2006
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 6188
Pages Range: L1880-L1880
DOI: 10.1117/12.664407
Abstract
For an accurate measurement the position of the cantilever must be measured in addition to the torsion and bending. The best solution is a combined detection system with a single laser beam. This system has been realized with a special interferometer system, in which the measuring beam is focused on the cantilever backside using a lens. The reflected beam is split with a part being detected by a quadrant photo-diode and the other part being fed back into the interferometer for position measurement. The quadrant photo-diode is used to detect the cantilever torsion and bending.
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Germany (DE)How to cite
APA:
Vorbringer-Dorozhovets, N., Hausotte, T., Manske, E., Jäger, G., & Hofmann, N. (2006). Metrological scanning probe microscope - art. no. 61880L. (pp. L1880-L1880). International Society for Optical Engineering; 1999.
MLA:
Vorbringer-Dorozhovets, Nataliya, et al. "Metrological scanning probe microscope - art. no. 61880L." International Society for Optical Engineering; 1999, 2006. L1880-L1880.
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