Investigation of the metrological properties of a 3-D microprobe with optical detection system
Balzer F, Hofmann N, Vorbringer-Dorozhovets N, Hausotte T, Manske E, Jäger G (2010)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2010
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 7767
Conference Proceedings Title: Proceedings Volume 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
Event location: San Diego, California, United States
DOI: 10.1117/12.863118
Abstract
An NPMM was used to analyse the metrological characteristics of the microprobe system and to calibrate it. This paper focuses on a detailed analysis of the three-dimensional reproducibility for point measurements by obtaining and evaluating a directional response pattern. This pattern is then compared to the behaviour of other microprobe systems. Furthermore, the work shows that the microprobe system can be applied successfully to scanning measurements and satisfactory results obtained. These results indicate that the microprobe system is well-suited for universal measurement tasks in dimensional metrology.
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Germany (DE)How to cite
APA:
Balzer, F., Hofmann, N., Vorbringer-Dorozhovets, N., Hausotte, T., Manske, E., & Jäger, G. (2010). Investigation of the metrological properties of a 3-D microprobe with optical detection system. In Proceedings Volume 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV. San Diego, California, United States: International Society for Optical Engineering; 1999.
MLA:
Balzer, Felix, et al. "Investigation of the metrological properties of a 3-D microprobe with optical detection system." Proceedings of the SPIE NanoScience + Engineering, San Diego, California, United States International Society for Optical Engineering; 1999, 2010.
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