Integration of CMM software standards for nanopositioning and nanomeasuring machines

Sparrer E, Hausotte T, Manske E, Machleidt T, Franke KH (2011)

Publication Status: Published

Publication Type: Conference contribution

Publication year: 2011

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Publisher: International Society for Optical Engineering; 1999

Book Volume: 8031

Conference Proceedings Title: SPIE - Micro- and nanotechnology sensors, systems, and applications III

Event location: Orlando

DOI: 10.1117/12.882822

Abstract

The function and architecture of the I++DME command interpreter is discussed and the principle of operation is demonstrated by means of an example controlling a nanopositioning and nanomeasuring machine with Hexagon Metrology's controlling and analyzing software QUINDOS 7 via the I++DME command interpreter server.

Authors with CRIS profile

Tino Hausotte Lehrstuhl für Fertigungsmesstechnik (FMT)

Involved external institutions

Technische Universität Ilmenau DE Germany (DE)

How to cite

APA:

Sparrer, E., Hausotte, T., Manske, E., Machleidt, T., & Franke, K.-H. (2011). Integration of CMM software standards for nanopositioning and nanomeasuring machines. In SPIE - Micro- and nanotechnology sensors, systems, and applications III. Orlando: International Society for Optical Engineering; 1999.

MLA:

Sparrer, Erik, et al. "Integration of CMM software standards for nanopositioning and nanomeasuring machines." Proceedings of the Micro- and Nanotechnology Sensors, Systems, and Applications Conference, Orlando International Society for Optical Engineering; 1999, 2011.

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