Multi-sensor technology based on a laser focus probe for nanomeasuring applications over large areas

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Details zur Publikation

Autorinnen und Autoren: Manske E, Jäger G, Hausotte T, Machleidt T
Verlag: International Society for Optical Engineering; 1999
Jahr der Veröffentlichung: 2011
Band: 8082
ISSN: 0277-786X


Abstract

Due to the development and progress in micro- and nanotechnology the range of measuring tasks is becoming ever more varied and multifaceted. Decreasing structure widths in combination with large area measurements or complex 3D-micro- and nanostructures with high aspect ratios not only on flat but also on curved surfaces are some of these measurement challenges. In order to solve the problems arising within this application spectrum a multi-sensor platform based on a laser focus probe was developed. This platform is integrated in the Nanopositioning and Nanomeasuring Machine developed mainly at the Institute of Process Measurement and Sensor Technology at the Ilmenau University of Technology with a measuring range of 25 mm x 25 mm x 5 mm and subnanometre resolution.


FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik


Einrichtungen weiterer Autorinnen und Autoren

Technische Universität Ilmenau


Zitierweisen

APA:
Manske, E., Jäger, G., Hausotte, T., & Machleidt, T. (2011). Multi-sensor technology based on a laser focus probe for nanomeasuring applications over large areas. International Society for Optical Engineering; 1999.

MLA:
Manske, Eberhard, et al. "Multi-sensor technology based on a laser focus probe for nanomeasuring applications over large areas." International Society for Optical Engineering; 1999, 2011.

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