New applications of the Nanomeasuring Machine (NPM-Machine) by novel optical and tactile probes with subnanometer repeatability
Jäger G, Manske E, Hausotte T (2006)
Publication Status: Published
Publication Type: Journal article
Publication year: 2006
Journal
Publisher: Oldenbourg Verlag
Book Volume: 73
Pages Range: 457-464
DOI: 10.1524/teme.2006.73.9.457
Abstract
This article presents new applications of the nanomeasuring machine developed by the Institute of Process Measurement and Sensor Technology at the Technische Universitat Ilmenau. The new applications to micro- and nanotechnology are based on the development of nanoscale optical and tactile probes used for zero-point indication only. We have realized and tested the following probes: a focal point sensor with a working distance of 10 mm, a white-light interference sensor, a tactile contour sensor and an AFM based on focusprobe. The present work concerns the integration of a tactile 3D-microtouch probe by IBS Netherland into the nanomeasuring machine.
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Germany (DE)How to cite
APA:
Jäger, G., Manske, E., & Hausotte, T. (2006). New applications of the Nanomeasuring Machine (NPM-Machine) by novel optical and tactile probes with subnanometer repeatability. Technisches Messen, 73, 457-464. https://doi.org/10.1524/teme.2006.73.9.457
MLA:
Jäger, Gerd, Eberhard Manske, and Tino Hausotte. "New applications of the Nanomeasuring Machine (NPM-Machine) by novel optical and tactile probes with subnanometer repeatability." Technisches Messen 73 (2006): 457-464.
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