FEM-based optimization of an inverse-magnetostrictive pressure sensor

Löffler M, Nierla M, Kadur M, Sutor A, Lerch R (2016)

Publication Language: English

Publication Type: Conference contribution

Publication year: 2016

Pages Range: 440

Conference Proceedings Title: Abstract Book

Event location: San Diego, CA

Abstract

The global demand for MEMS pressure sensors is constantly increasing. Usually, the piezoresistive
or the capacitive effect is exploited in such devices. However, it has already been shown that
sensors based on the inverse-magnetostrictive (Villari) effect feature a remarkable sensitivity while
overcoming drawbacks of the established principles like temperature-instability and non-linearity. Although simulations are crucial for the further development and optimization, simulations
incorporating the magnetostrictive and the inverse-magnetostrictive effect in such devices have
been missing until now. In this contribution, we present an iterative FE-scheme using VSM-
measurements to consider the stress-dependent permeability of the magnetostrictive layers of such
sensors. With this approach, the dimensions of the single layers are optimized to achieve maximum
sensitivity.

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How to cite

APA:

Löffler, M., Nierla, M., Kadur, M., Sutor, A., & Lerch, R. (2016). FEM-based optimization of an inverse-magnetostrictive pressure sensor. In AIP, IEEE (Eds.), Abstract Book (pp. 440). San Diego, CA, US.

MLA:

Löffler, Michael, et al. "FEM-based optimization of an inverse-magnetostrictive pressure sensor." Proceedings of the MMM - Intermag Joint Conference, San Diego, CA Ed. AIP, IEEE, 2016. 440.

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