Recent developments and challenges of nanopositioning and nanomeasuring technology
Manske E, Jäger G, Hausotte T, Füßl R (2012)
Publication Type: Journal article
Publication year: 2012
Journal
Publisher: Institute of Physics: Hybrid Open Access
Pages Range: 074001-074010
Journal Issue: 23
DOI: 10.1088/0957-0233/23/7/074001
Abstract
Rapid progress in several high-tech industries has significantly increased the need for dimensional micro- and nano-metrology. Structures to be measured are becoming more complex with smaller structure widths and higher aspect ratios in increasingly larger surface regions and potentially highly curved surfaces. Significant international effort can be seen to develop high-capacity measuring machines with nanometre precision in growing measuring ranges up to hundreds of millimetres. This paper begins with an outline of the requirements stemming from high-tech developments currently being done or expected in the future and discusses recent developments in the field of nanopositioning and nanomeasuring technology with respect to basic measurement approaches, laser interferometer systems. The large range of nanoprobe systems usable in nanomeasuring machines is discussed, such as optical focus sensors, white light interferometer microscopes, CCD camera microscopes using the depth from the focus method, tactile stylus probes, atomic force microscopes (AFMs) and 3D microprobes. The versatile properties of these sensors allow the machine to be used in many different metrological applications. The paper also introduces a multi-sensor approach using a microscope revolver. It concludes with an illustration of metrologically challenging measurements, e.g., scanning micro-structures of curved optical surfaces or performing AFM scans of very large regions with significant data volume. © 2012 IOP Publishing Ltd.
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APA:
Manske, E., Jäger, G., Hausotte, T., & Füßl, R. (2012). Recent developments and challenges of nanopositioning and nanomeasuring technology. Measurement Science & Technology, 23, 074001-074010. https://doi.org/10.1088/0957-0233/23/7/074001
MLA:
Manske, Eberhard, et al. "Recent developments and challenges of nanopositioning and nanomeasuring technology." Measurement Science & Technology 23 (2012): 074001-074010.
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