Surface and coordinate measurements with nanomeasuring machines

Beitrag in einer Fachzeitschrift

Details zur Publikation

Autorinnen und Autoren: Hausotte T, Balzer F, Vorbringer-Dorozhovets N, Manske E
Zeitschrift: International Journal of Nanomanufacturing
Verlag: Inderscience Publishers
Jahr der Veröffentlichung: 2012
Band: 8
Heftnummer: 5/6
Seitenbereich: 467-483
ISSN: 1746-9392
eISSN: 1746-9406


The nanomeasuring machine (NMM-1) was designed for surface and coordinate measurements within a measurement volume of 25 mm × 25 mm × 5 mm. The machine is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. Various measurement tasks are possible depending on the probe system installed. Most of the sensors utilised are one-dimensional tactile or optical surface sensors or probes. In recent years, measurements of three-dimensional features and sidewalls are becoming more important. For these more complex measurements, probe systems with two or three directions of sensitivity are necessary and were therefore integrated into the NMM-1. The article gives an overview of the operation and properties of the NMM-1, its use for surface and coordinate measurements, of integrated probe systems and of two probing systems developed. Copyright © 2013 Inderscience Enterprises Ltd.

FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik

Einrichtungen weiterer Autorinnen und Autoren

Technische Universität Ilmenau


Hausotte, T., Balzer, F., Vorbringer-Dorozhovets, N., & Manske, E. (2012). Surface and coordinate measurements with nanomeasuring machines. International Journal of Nanomanufacturing, 8(5/6), 467-483.

Hausotte, Tino, et al. "Surface and coordinate measurements with nanomeasuring machines." International Journal of Nanomanufacturing 8.5/6 (2012): 467-483.


Zuletzt aktualisiert 2018-07-08 um 14:23