Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine
Hausotte T, Percle B, Jäger G (2009)
Publication Status: Published
Publication Type: Journal article
Publication year: 2009
Journal
Publisher: Institute of Physics: Hybrid Open Access
Book Volume: 20
DOI: 10.1088/0957-0233/20/8/084004
Abstract
The nanopositioning and nanomeasuring machine developed at the Ilmenau University of Technology was originally designed for surface measurements within a measuring volume of 25 mm x 25 mm x 5 mm. The interferometric length measuring and drive systems make it possible to move the stage with a resolution of 0.1 nm and a positioning uncertainty of less than 10 nm in all three axes. Various measuring tasks are possible depending on the installed probe system. Most of the sensors utilized are one-dimensional surface probes; however, some tasks require measuring sidewalls and other three-dimensional features. A new control system, based on the I++ DME specification, was implemented in the device. The I++ DME scan functions were improved and special scan functions added to allow advanced three-dimensional scan methods, further fulfilling the demands of scanning force microscopy and micro-coordinate measurements. This work gives an overview of these new functions and the application of them for several different measurements.
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Germany (DE)How to cite
APA:
Hausotte, T., Percle, B., & Jäger, G. (2009). Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine. Measurement Science & Technology, 20. https://doi.org/10.1088/0957-0233/20/8/084004
MLA:
Hausotte, Tino, Brandon Percle, and Gerd Jäger. "Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine." Measurement Science & Technology 20 (2009).
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