Simulation of Trench Homogeneity in Plasma Immersion IonImplantation

Keller G, Stals L, Mändl S, Rauschenbach B, Rüde U (2001)

Publication Type: Journal article

Publication year: 2001

Journal

Journal of Applied Physics AIP Publishing

Publisher: American Institute of Physics (AIP)

Book Volume: 88

Pages Range: 1111-1117

URI: http://scitation.aip.org/deliver/fulltext/aip/journal/jap/88/2/1.373784.pdf;jsessionid=1jbor09gmia7p.x-aip-live-03?itemId=/content/aip/journal/jap/88/2/10.1063/1.373784&mimeType=pdf&containerItemId=content/aip/journal/jap

Authors with CRIS profile

Ulrich Rüde Lehrstuhl für Informatik 10 (Systemsimulation)

How to cite

APA:

Keller, G., Stals, L., Mändl, S., Rauschenbach, B., & Rüde, U. (2001). Simulation of Trench Homogeneity in Plasma Immersion IonImplantation. Journal of Applied Physics, 88, 1111-1117.

MLA:

Keller, G., et al. "Simulation of Trench Homogeneity in Plasma Immersion IonImplantation." Journal of Applied Physics 88 (2001): 1111-1117.

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