Fibre-coupled monochromatic zero-point sensor for precision positioning systems using laser interferometers
Balzer F, Gerhardt U, Hausotte T, Manske E, Jäger G (2012)
Publication Status: Published
Publication Type: Journal article
Publication year: 2012
Journal
Publisher: Institute of Physics: Hybrid Open Access
Book Volume: 23
DOI: 10.1088/0957-0233/23/7/074008
Abstract
This paper focuses on a novel fibre-coupled monochromatic zero-point reference sensor for high-precision measurement and positioning tasks, especially for use in nanopositioning and nanomeasuring machines. The motivation for this development and the basic concept of the confocal-based sensor are explained in detail. Differences from other similar systems also realizing the confocal principle through fibre coupling are pointed out. Furthermore, the optical system design is described. Initial experimental results using this sensor as a probe system in a nanopositioning and nanomeasuring machine, and investigations into the metrological properties are discussed, which underscore the great potential for utilization as a reference sensor.
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Germany (DE)How to cite
APA:
Balzer, F., Gerhardt, U., Hausotte, T., Manske, E., & Jäger, G. (2012). Fibre-coupled monochromatic zero-point sensor for precision positioning systems using laser interferometers. Measurement Science & Technology, 23. https://dx.doi.org/10.1088/0957-0233/23/7/074008
MLA:
Balzer, Felix, et al. "Fibre-coupled monochromatic zero-point sensor for precision positioning systems using laser interferometers." Measurement Science & Technology 23 (2012).
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