In operandi observation of dynamic annealing: A case study of boron in germanium nanowire devices

Kolesnik-Gray M, Sorger C, Biswas S, Holmes JD, Weber HB, Krstic V (2015)


Publication Language: English

Publication Type: Journal article, Letter

Publication year: 2015

Journal

Publisher: American Institute of Physics (AIP)

Book Volume: 106

Article Number: 233109

URI: http://scitation.aip.org/content/aip/journal/apl/106/23/10.1063/1.4922527

DOI: 10.1063/1.4922527

Abstract

We report on the implantation of boron in individual, electrically contacted germanium nanowires with varying diameter and present a technique that monitors the electrical properties of a single device during implantation of ions. This method gives improved access to study the dynamic annealing ability of the nanowire at room temperature promoted by its quasi-one-dimensional confinement. Based on electrical data, we find that the dopant activation efficiency is nontrivially diameter dependent. As the diameter decreases, a transition from a pronounced dynamic-annealing to a radiation-damage dominated regime is observed.

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APA:

Kolesnik-Gray, M., Sorger, C., Biswas, S., Holmes, J.D., Weber, H.B., & Krstic, V. (2015). In operandi observation of dynamic annealing: A case study of boron in germanium nanowire devices. Applied Physics Letters, 106. https://doi.org/10.1063/1.4922527

MLA:

Kolesnik-Gray, Maria, et al. "In operandi observation of dynamic annealing: A case study of boron in germanium nanowire devices." Applied Physics Letters 106 (2015).

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