Lindlein N (1998)
Publication Type: Journal article
Publication year: 1998
Publisher: International Society for Optical Engineering; 1999
Book Volume: 3407
Pages Range: 47-54
DOI: 10.1117/12.323352
Several devices for the measurement of micro-optical elements will be presented. These are a Mach-Zehnder interference microscope for the measurement of the wave aberrations of microlenses in transmission using a HeNe laser (633nm wavelength) and a shearing interferometer for the measurement of microlenses in transmission in the near infrared (1319nm). This shearing interferometer uses two Ronchi gratings to provide a lateral shear and is therefore very compact and stable. We also describe a Twyman-Green interference microscope for the measurement of (nearly) spherical surfaces in reflection using partially coherent illumination. Microlenses can be also used to build measurement devices for micro- and macro-optics. We will present a Shack-Hartmann wavefront sensor with microlenses for the measurement of quite arbitrary wavefronts and a confocal set-up which uses an array of microlenses and stops to provide a confocal measurement without a lateral scanning of the object. This confocal setup can be used to measure the surface profile of micro-optical structures like gratings or microlenses.
APA:
Lindlein, N. (1998). Measurement devices with and for micro-optics at the university of Erlangen. Proceedings of SPIE, 3407, 47-54. https://doi.org/10.1117/12.323352
MLA:
Lindlein, Norbert. "Measurement devices with and for micro-optics at the university of Erlangen." Proceedings of SPIE 3407 (1998): 47-54.
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