Nanometer-scale modification of the tribological properties of Si(111):H surfaces performed and investigated by a conducting-probe scanning force microscope

Journal article


Publication Details

Author(s): Hundhausen M, Ley L
Journal: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Publication year: 1996
Volume: 14
Pages range: 1268
ISSN: 0734-211X


FAU Authors / FAU Editors

Hundhausen, Martin apl. Prof. Dr.
Lehrstuhl für Laserphysik
Ley, Lothar Prof. Dr.
Naturwissenschaftliche Fakultät

Last updated on 2018-09-08 at 05:08