Modeling mechanical dynamics of MEMS self actuation in ADS and its application

Mzyk R, Fischer G (2010)

Publication Type: Conference contribution

Publication year: 2010

Publisher: IEEE

Conference Proceedings Title: IEEE International Microwave Symposium

Event location: Anaheim (California), USA

Authors with CRIS profile

Raphael Mzyk Lehrstuhl für Technische Elektronik Georg Fischer Professur für Technische Elektronik

How to cite

APA:

Mzyk, R., & Fischer, G. (2010). Modeling mechanical dynamics of MEMS self actuation in ADS and its application. In IEEE International Microwave Symposium. Anaheim (California), USA: IEEE.

MLA:

Mzyk, Raphael, and Georg Fischer. "Modeling mechanical dynamics of MEMS self actuation in ADS and its application." Proceedings of the IEEE International Microwave Symposium, Anaheim (California), USA IEEE, 2010.

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