Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts

Adelmann B, Hürner A, Schlegel T, Bauer A, Frey L, Hellmann R (2013)

Publication Status: Published

Publication Type: Other publication type

Publication year: 2013

Journal

Journal of Laser Micro Nanoengineering Japan Laser Processing Society (JLPS)

Book Volume: 8

Pages Range: 97-101

Journal Issue: 1

DOI: 10.2961/jlmn.2013.01.0019

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE) Hochschule Aschaffenburg DE Germany (DE)

How to cite

APA:

Adelmann, B., Hürner, A., Schlegel, T., Bauer, A., Frey, L., & Hellmann, R. (2013). Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts.

MLA:

Adelmann, Benedikt, et al. Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts. 2013.

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