Setup and evaluation of a sensor tilting system for dimensional micro- and nanometrology

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Details zur Publikation

Autorinnen und Autoren: Schuler A, Weckenmann A, Hausotte T
Verlag: Institute of Physics: Hybrid Open Access
Jahr der Veröffentlichung: 2014
Band: 25
ISSN: 0957-0233


Sensors in micro- and nanometrology show their limits if the measurement objects and surfaces feature high aspect ratios, high curvature and steep surface angles. Their measurable surface angle is limited and an excess leads to measurement deviation and not detectable surface points. We demonstrate a principle to adapt the sensor's working angle during the measurement keeping the sensor in its optimal working angle. After the simulation of the principle, a hardware prototype was realized. It is based on a rotary kinematic chain with two rotary degrees of freedom, which extends the measurable surface angle to +/- 90 degrees and is combined with a nanopositioning and nanomeasuring machine. By applying a calibration procedure with a quasi-tactile 3D sensor based on electrical near-field interaction the systematic position deviation of the kinematic chain is reduced. The paper shows for the first time the completed setup and integration of the prototype, the performance results of the calibration, the measurements with the prototype and the tilting principle, and finishes with the interpretation and feedback of the practical results.

FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik
Schuler, Alexander Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik
Weckenmann, Albert Prof. Dr.-Ing.
Technische Fakultät


Schuler, A., Weckenmann, A., & Hausotte, T. (2014). Setup and evaluation of a sensor tilting system for dimensional micro- and nanometrology. Institute of Physics: Hybrid Open Access.

Schuler, Alexander, Albert Weckenmann, and Tino Hausotte. "Setup and evaluation of a sensor tilting system for dimensional micro- and nanometrology." Institute of Physics: Hybrid Open Access, 2014.


Zuletzt aktualisiert 2018-07-08 um 14:53