A framework for using optical sensors in nanomeasuring machines over I++/DME
Sparrer E, Machleidt T, Hausotte T, Franke KH, Manske E (2012)
Publication Status: Published
Publication Type: Journal article
Publication year: 2012
Journal
Publisher: Institute of Physics: Hybrid Open Access
Book Volume: 23
DOI: 10.1088/0957-0233/23/7/074013
Abstract
This paper discusses the problem of integrating optical sensors into CMMs. First the basic concept of optical sensors is briefly introduced as well as the targeted measurement implementation standard, I++DME, and the Optical Sensor Interface Standard, which is still seldom used but is gaining acceptance. A novel generic software framework is introduced which helps to simplify the use of optical sensors in CMMs. To demonstrate the feasibility of integrating an optical sensor into a CMM, the framework has been successfully implemented around a white light interferometer, in which the sensor system is mounted in an ultra-precision CMM. The actual process control and data analysis was done using a third-party metrology application, which does not normally support either ultra-precision CMMs or optical sensors.
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Germany (DE)How to cite
APA:
Sparrer, E., Machleidt, T., Hausotte, T., Franke, K.-H., & Manske, E. (2012). A framework for using optical sensors in nanomeasuring machines over I++/DME. Measurement Science & Technology, 23. https://doi.org/10.1088/0957-0233/23/7/074013
MLA:
Sparrer, Erik, et al. "A framework for using optical sensors in nanomeasuring machines over I++/DME." Measurement Science & Technology 23 (2012).
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