A framework for using optical sensors in nanomeasuring machines over I++/DME

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autorinnen und Autoren: Sparrer E, Machleidt T, Hausotte T, Franke KH, Manske E
Zeitschrift: Measurement Science & Technology
Verlag: Institute of Physics: Hybrid Open Access
Jahr der Veröffentlichung: 2012
Band: 23
ISSN: 0957-0233


Abstract

This paper discusses the problem of integrating optical sensors into CMMs. First the basic concept of optical sensors is briefly introduced as well as the targeted measurement implementation standard, I++DME, and the Optical Sensor Interface Standard, which is still seldom used but is gaining acceptance. A novel generic software framework is introduced which helps to simplify the use of optical sensors in CMMs. To demonstrate the feasibility of integrating an optical sensor into a CMM, the framework has been successfully implemented around a white light interferometer, in which the sensor system is mounted in an ultra-precision CMM. The actual process control and data analysis was done using a third-party metrology application, which does not normally support either ultra-precision CMMs or optical sensors.


FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hausotte, Tino Prof. Dr.-Ing.
Lehrstuhl für Fertigungsmesstechnik


Einrichtungen weiterer Autorinnen und Autoren

Technische Universität Ilmenau


Zitierweisen

APA:
Sparrer, E., Machleidt, T., Hausotte, T., Franke, K.-H., & Manske, E. (2012). A framework for using optical sensors in nanomeasuring machines over I++/DME. Measurement Science & Technology, 23. https://dx.doi.org/10.1088/0957-0233/23/7/074013

MLA:
Sparrer, Erik, et al. "A framework for using optical sensors in nanomeasuring machines over I++/DME." Measurement Science & Technology 23 (2012).

BibTeX: 

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