Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant

Glaser A, Rosiwal S, Singer R (2006)


Publication Language: English

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2006

Journal

Book Volume: 15

Pages Range: 49-54

Journal Issue: 1

DOI: 10.1016/j.diamond.2005.07.010

Abstract

We designed a new hot-filament plant which features some new operating states for chemical vapor infiltration (CVI) with diamond. Most characteristic for the new hot-filament plant is the possibility of a forced flow of the activated gas species through a porous substrate. Separate feeding of hydrogen, methane and oxygen above or underneath the substrate ensures the production of pertinent carbon growth species like CH directly at or in the substrate or rather in the pore. We infiltrated porous substrates by using several operating states and compared the results with standard processes. For these first experiments we have set the addition of oxygen aside, which was viable for the infiltration experiments described in Part I of the paper. In order to achieve good infiltration results it was necessary to use very low methane concentrations between 0.2% and 0.3%. We were able to infiltrate at high growth rates (> 0.5 μm/h) combined with a good diamond quality (> 90%). Moreover it was possible to alleviate the "bottleneck" effect which we described in Part I of the paper. Raman spectroscopy and SEM were used to characterize the deposited or rather infiltrated diamond. © 2005 Elsevier B.V. All rights reserved.

Authors with CRIS profile

Related research project(s)

How to cite

APA:

Glaser, A., Rosiwal, S., & Singer, R. (2006). Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant. Diamond and Related Materials, 15(1), 49-54. https://dx.doi.org/10.1016/j.diamond.2005.07.010

MLA:

Glaser, Arno, Stefan Rosiwal, and Robert Singer. "Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant." Diamond and Related Materials 15.1 (2006): 49-54.

BibTeX: Download