Methylated [(arene)(1,3-cyclohexadiene)Ru(0)] complexes as low-melting MOCVD precursor complexes with a controlled follow-up chemistry of the ligands

Beitrag in einer Fachzeitschrift
(Originalarbeit)


Details zur Publikation

Autor(en): Jipa I, Danova K, Popovska N, Siddiqi MA, Siddiqui RA, Atakan B, Cremer T, Maier F, Marbach H, Steinrück HP, Heinemann F, Zenneck U
Zeitschrift: Journal of Materials Chemistry
Verlag: Royal Society of Chemistry
Jahr der Veröffentlichung: 2011
Band: 21
Heftnummer: 9
Seitenbereich: 3014-3024
ISSN: 0959-9428


Abstract


[(Benzene)(2-methyl-1,3-cyclohexadiene)Ru(0)] (1), [(1,3-cyclohexadiene) (toluene)Ru(0)] (2), and [(methyl-cyclohexadiene)(toluene)Ru(0)] (3, mixture of isomers) have been prepared and tested as new metal organic ruthenium precursor complexes for chemical vapor deposition (MOCVD) with favorable properties. 1 is a low-melting precursor complex (mp = 29 °C) and the isomeric mixture 3 forms a liquid at room temperature. X-ray diffraction studies of single crystals of complexes 1 and 2 are characteristic for true Ru(0) π-complexes without molecular structure peculiarities or significant intermolecular interactions in the solid state, which could hinder undecomposed evaporation. Differential thermal analysis (DTA), differential scanning calorimetry (DSC) and vapor pressure data qualify the compounds as almost ideal MOCVD precursors. Thin ruthenium films have been deposited successfully on silicon wafers and substrate temperatures between 200 and 450 °C in inert gas atmospheres. Film growth and properties were evaluated by scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and four-point probe conductivity measurements. All films consist of polycrystalline metallic ruthenium with a low surface roughness. © The Royal Society of Chemistry 2011.



FAU-Autoren / FAU-Herausgeber

Cremer, Till Dr.
Lehrstuhl für Physikalische Chemie II
Heinemann, Frank Dr.
Lehrstuhl für Anorganische und Allgemeine Chemie
Maier, Florian Dr.
Lehrstuhl für Physikalische Chemie II
Marbach, Hubertus PD Dr.
Naturwissenschaftliche Fakultät
Popovska, Nadejda Prof. Dr.
Technische Fakultät
Steinrück, Hans-Peter Prof. Dr.
Lehrstuhl für Physikalische Chemie II
Zenneck, Ulrich Prof. Dr.
Naturwissenschaftliche Fakultät


Autor(en) der externen Einrichtung(en)
Universität Duisburg-Essen


Zitierweisen

APA:
Jipa, I., Danova, K., Popovska, N., Siddiqi, M.A., Siddiqui, R.A., Atakan, B.,... Zenneck, U. (2011). Methylated [(arene)(1,3-cyclohexadiene)Ru(0)] complexes as low-melting MOCVD precursor complexes with a controlled follow-up chemistry of the ligands. Journal of Materials Chemistry, 21(9), 3014-3024. https://dx.doi.org/10.1039/c0jm02652b

MLA:
Jipa, Ilona, et al. "Methylated [(arene)(1,3-cyclohexadiene)Ru(0)] complexes as low-melting MOCVD precursor complexes with a controlled follow-up chemistry of the ligands." Journal of Materials Chemistry 21.9 (2011): 3014-3024.

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Zuletzt aktualisiert 2018-08-08 um 21:53