Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: Protective capping of metallic iron structures

Schirmer M, Walz MM, Papp C, Kronast F, Gray A, Balke B, Cramm S, Fadley C, Steinrück HP, Marbach H (2011)

Publication Type: Journal article

Publication year: 2011

Journal

Nanotechnology Institute of Physics: Hybrid Open Access

Original Authors: Schirmer M., Walz M.-M., Papp C., Kronast F., Gray A.X., Balke B., Cramm S., Fadley C.S., Steinrück H.-P., Marbach H.

Publisher: Institute of Physics: Hybrid Open Access

Book Volume: 22

Article Number: 475304

Journal Issue: 47

DOI: 10.1088/0957-4484/22/47/475304

Abstract

We report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon exposure to air. © 2011 IOP Publishing Ltd.

Authors with CRIS profile

Michael Schirmer Lehrstuhl für Physikalische Chemie II Marie-Madeleine Walz Lehrstuhl für Physikalische Chemie II Christian Papp Lehrstuhl für Physikalische Chemie II Hans-Peter Steinrück Lehrstuhl für Physikalische Chemie II Hubertus Marbach Professur für Experimentalphysik

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials

Involved external institutions

Helmholtz-Zentrum Berlin für Materialien und Energie (HZB) DE Germany (DE) University of California Davis (UCDAVIS) US United States (USA) (US) Johannes Gutenberg-Universität Mainz (JGU) DE Germany (DE) Forschungszentrum Jülich / Research Centre Jülich (FZJ) DE Germany (DE)

How to cite

APA:

Schirmer, M., Walz, M.-M., Papp, C., Kronast, F., Gray, A., Balke, B.,... Marbach, H. (2011). Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: Protective capping of metallic iron structures. Nanotechnology, 22(47). https://doi.org/10.1088/0957-4484/22/47/475304

MLA:

Schirmer, Michael, et al. "Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: Protective capping of metallic iron structures." Nanotechnology 22.47 (2011).

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