RF MEMS and NEMS technology, devices, and applications

Fischer G, Gammel P, Bouchaud J (2005)


Publication Type: Journal article

Publication year: 2005

Journal

Publisher: Lucent Technologies

Book Volume: 10

Pages Range: 29-59

Journal Issue: 3

DOI: 10.1002/bltj.20103

Abstract

Will RF MEMS deliver on its promise to be one of the major MEMS businesses in the future? RF MEMS has now entered its second generation; high-volume production of both contacting and non-contacting switches and filters (based on bulk acoustic waves) was ramped up worldwide starting in 2003. In first-generation RF MEMS, discrete components were developed to demonstrate RF performance and reliability, and low-cost, high-volume chipand wafer-scale packaging eliminated the final barriers to high-volume production of discrete replacement components with MEMS. In this paper, we review the RF MEMS industry and the commercialization status of RF MEMS components. We also provide a detailed case study of mobile telephone basestations, demonstrating how RF MEMS can impact telecommunications. Finally, we look at research into third-generation RF MEMS and NEMS, in which integration, active devices, and new functionality will create opportunities for disruptive changes in RF subsystems, enabling such things as software-defined radio. © 2005 Lucent Technologies Inc.

Authors with CRIS profile

How to cite

APA:

Fischer, G., Gammel, P., & Bouchaud, J. (2005). RF MEMS and NEMS technology, devices, and applications. Bell Labs Technical Journal, 10(3), 29-59. https://dx.doi.org/10.1002/bltj.20103

MLA:

Fischer, Georg, P. Gammel, and J. Bouchaud. "RF MEMS and NEMS technology, devices, and applications." Bell Labs Technical Journal 10.3 (2005): 29-59.

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