RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication

Fischer G, De Los Santos H, Tilmans H, van Beek J (2004)

Publication Type: Journal article

Publication year: 2004

Journal

IEEE Microwave Magazine Institute of Electrical and Electronics Engineers (IEEE)

Publisher: IEEE

Book Volume: 5

Pages Range: 36-49

Journal Issue: 4

DOI: 10.1109/MMW.2004.1380277(410)5

Abstract

The aim of this article to expose the impact and status of the application of RF-MEMS switchable capacitors, varactors and switches in the three elements of this paradigm, namely, handsets, base stations, and satellites. In particular, issues such as system-level motivation/justification for RF MEMS, device requirements, high-volume manufacturing, packaging, and state-of-the-art performance and reliability, are presented.

Authors with CRIS profile

Georg Fischer Professur für Technische Elektronik

How to cite

APA:

Fischer, G., De Los Santos, H., Tilmans, H., & van Beek, J. (2004). RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication. IEEE Microwave Magazine, 5(4), 36-49. https://dx.doi.org/10.1109/MMW.2004.1380277(410)5

MLA:

Fischer, Georg, et al. "RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication." IEEE Microwave Magazine 5.4 (2004): 36-49.

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