Impurity incorporation during beam assisted processing analyzed using nuclear microprobe

Park Y, Takai M, Lehrer C, Frey L, Ryssel H (1999)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1999

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Publisher: Elsevier Science Publishers B.V.

City/Town: Amsterdam

Book Volume: 158

Pages Range: 487-492

Event location: Cape Town, S Afr

Journal Issue: 1

DOI: 10.1016/S0168-583X(99)00371-7

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Park, Y., Takai, M., Lehrer, C., Frey, L., & Ryssel, H. (1999). Impurity incorporation during beam assisted processing analyzed using nuclear microprobe. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 158(1), 487-492. https://dx.doi.org/10.1016/S0168-583X(99)00371-7

MLA:

Park, Y., et al. "Impurity incorporation during beam assisted processing analyzed using nuclear microprobe." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 158.1 (1999): 487-492.

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