Radial oxygen precipitation of a 12 '' CZ silicon crystal studied in-situ with high energy X-ray diffraction

Beitrag in einer Fachzeitschrift


Details zur Publikation

Autor(en): Bergmann C, Will J, Gröschel A, Weißer M, Magerl A
Zeitschrift: Physica Status Solidi A-Applications and Materials Science
Verlag: WILEY-V C H VERLAG GMBH
Jahr der Veröffentlichung: 2014
Band: 211
Heftnummer: 11
Seitenbereich: 2450-2454
ISSN: 1862-6300


Abstract


The radial oxygen nucleation and precipitation in Czochralski-grown silicon crystals is observed in real time via the local evolution of the X-ray Bragg intensity. Using a high X-ray energy and a divergent beam setup, it becomes possible to examine the impact of the local as-grown point defect configuration on the formation of bulk micro defects in a crystal of macroscopic dimensions. As a salient feature the transition from vacancy- to interstitial-dominated regions in a 12 crystal can be identified, and its influence on the precipitation kinetics is quantified through effective oxygen diffusion constant. It appears enhanced by up to a factor of six in vacancy-rich regions as compared to crystal volumes which are identified as point-defect free where it agrees well with the literature value.



FAU-Autoren / FAU-Herausgeber

Bergmann, Christoph
Lehrstuhl für Kristallographie und Strukturphysik
Gröschel, Alexander
Lehrstuhl für Kristallographie und Strukturphysik
Magerl, Andreas Prof. Dr.
Lehrstuhl für Kristallographie und Strukturphysik
Weißer, Matthias Dr.
Lehrstuhl für Kristallographie und Strukturphysik
Will, Johannes Dr.
Lehrstuhl für Kristallographie und Strukturphysik


Zitierweisen

APA:
Bergmann, C., Will, J., Gröschel, A., Weißer, M., & Magerl, A. (2014). Radial oxygen precipitation of a 12 '' CZ silicon crystal studied in-situ with high energy X-ray diffraction. Physica Status Solidi A-Applications and Materials Science, 211(11), 2450-2454. https://dx.doi.org/10.1002/pssa.201400062

MLA:
Bergmann, Christoph, et al. "Radial oxygen precipitation of a 12 '' CZ silicon crystal studied in-situ with high energy X-ray diffraction." Physica Status Solidi A-Applications and Materials Science 211.11 (2014): 2450-2454.

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Zuletzt aktualisiert 2018-11-08 um 02:11