Investigation of rapid thermal annealed pn-junctions in SiC

Frey L, Rambach M, Weiss R, Bauer A, Ryssel H (2004)

Publication Status: Published

Publication Type: Authored book, Volume of book series

Publication year: 2004

Pages Range: 1073-1076

Event location: Lyon

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-8744264042&origin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Frey, L., Rambach, M., Weiss, R., Bauer, A., & Ryssel, H. (2004). Investigation of rapid thermal annealed pn-junctions in SiC.

MLA:

Frey, Lothar, et al. Investigation of rapid thermal annealed pn-junctions in SiC. 2004.

BibTeX: Download