Dielectric layers suitable for high voltage integrated trench capacitors

vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L (2011)


Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2011

Journal

Publisher: AVS Science and Technology Society

Book Volume: 29

Journal Issue: 1

DOI: 10.1116/1.3525283

Authors with CRIS profile

Involved external institutions

How to cite

APA:

vom Dorp, J., Erlbacher, T., Bauer, A.J., Ryssel, H., & Frey, L. (2011). Dielectric layers suitable for high voltage integrated trench capacitors. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 29(1). https://dx.doi.org/10.1116/1.3525283

MLA:

vom Dorp, Joachim, et al. "Dielectric layers suitable for high voltage integrated trench capacitors." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 29.1 (2011).

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