Activity Development and Up-Scaling of the hot filament process for diamond CVD

Internally funded project

Project Details

Project leader:
PD Dr.-Ing. Stefan Rosiwal

Contributing FAU Organisations:
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)

Start date: 01/01/2000

Research Fields

Ultra Hard Coatings
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)

Abstract (technical / expert description):

Research of hot-filament CVD technology constantly continues to provide new scientific developments that are transferred into economically functioning products. This business model enabled the establishment of the worldwide largest experimental CVD facility.

Development details:

  • Upscaling of the hot-filament diamond surface area up to 10.000cm2.

  • Flexible chamber set up to coat small (weight < 1 g) as well as large components (weight > 40 kg) via CVD.

  • Reduction of energy input (electric power/carat) for hot-filament CVD.

  • Homogenisation of diamond growth rate and boron doping for a 2D and 3D substrates.

  • Reproducible substrate temperature ranging from 650 °C to 950 °C.

  • Integration of heat treatment during the hot-filament process.

  • Development of in-situ measurements, e.g. online measurement of diamond growth rate.

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Schwarz, S., Zeiler, E., Rosiwal, S., & Singer, R. (2001). Diamond Coatings as Wear Protection for Metallic Devices with Complex Geometry. In S. Rosiwal (Eds.), FOROB II Abschlußbericht (pp. 33-50).
Jentsch, H.-G., Eibisch, H., Rosiwal, S., & Singer, R. (2001). High growth rate and high quality CVD diamond growth. In Applied Diamond Coating / Frontier Carbon Technology (pp. 333-343). Auburn.
Zeiler, E., Hiltner, K., Lemmer, O., Rosiwal, S., & Singer, R. (1999). 3D-Diamantbeschichtung von Titanbauteilen. In H. Dimigen, W. Paatsch (Eds.), Oberflächentechnik / Werkstoffwoche 98, Symposium 11 (pp. 83-88). München, DE: Wiley-VCH.
Grögler, T., Zeiler, E., Rosiwal, S., & Singer, R. (1999). 3D-Diamantbeschichtung von Titanverdichterschaufeln in Flugtriebwerken. In FDS (Eds.), . Frankfurt/Main, DE: Dresden: FDS.
Rosiwal, S., Zeiler, E., Rüffer, M., Schwarz, S., Lemmer, O., & Singer, R. (1999). Well adherent and morphologically controlled diamond coatings on three dimensional engineering components: A physicists dream or an engineer's reality? San Diego: Elsevier.
Zeiler, E., Grögler, T., Plewa, O., Winter, R., Rosiwal, S., & Singer, R. (1997). CVD-Diamantschichten als Verschleißschutz von Metallen. In GFE (Eds.), . Chemnitz.

Last updated on 2019-03-05 at 11:55