Activity Development and Up-Scaling of the hot filament process for diamond CVD

Internally funded project


Project Details

Project leader:
PD Dr.-Ing. Stefan Rosiwal


Contributing FAU Organisations:
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)

Start date: 01/01/2000


Research Fields

Ultra Hard Coatings
Lehrstuhl für Werkstoffwissenschaften (Werkstoffkunde und Technologie der Metalle)


Abstract (technical / expert description):


Research of hot-filament CVD technology constantly continues to provide new scientific developments that are transferred into economically functioning products. This business model enabled the establishment of the worldwide largest experimental CVD facility.



Development details:




  • Upscaling of the hot-filament diamond surface area up to 10.000cm2.


  • Flexible chamber set up to coat small (weight < 1 g) as well as large components (weight > 40 kg) via CVD.


  • Reduction of energy input (electric power/carat) for hot-filament CVD.


  • Homogenisation of diamond growth rate and boron doping for a 2D and 3D substrates.


  • Reproducible substrate temperature ranging from 650 °C to 950 °C.


  • Integration of heat treatment during the hot-filament process.


  • Development of in-situ measurements, e.g. online measurement of diamond growth rate.


Publications
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Ramakrishnan, R., Lodes, M., Rosiwal, S., & Singer, R. (2011). Self-supporting nanocrystalline diamond foils: Influence of template morphologies on the mechanical properties measured by ball on three balls testing. Acta Materialia, 59(9), 3343-3351. https://dx.doi.org/10.1016/j.actamat.2011.02.009
Hirmke, J., Rosiwal, S., & Singer, R. (2008). Monitoring oxygen species in diamond hot-filament CVD by zircon dioxide sensors. Vacuum, 82(6), 599-607. https://dx.doi.org/10.1016/j.vacuum.2007.09.002
Hirmke, J., Glaser, A., Hempel, F., Stancu, G.D., Röpcke, J., Rosiwal, S., & Singer, R. (2007). Improved flow conditions in diamond hot filament CVD-Promising deposition results and gas phase characterization by laser absorption spectroscopy. Vacuum, 81(5), 619-626. https://dx.doi.org/10.1016/j.vacuum.2006.08.004
Glaser, A., Rosiwal, S., & Singer, R. (2006). Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant. Diamond and Related Materials, 15(1), 49-54. https://dx.doi.org/10.1016/j.diamond.2005.07.010
Hirmke, J., Schwarz, S., Rottmair, C.A., Rosiwal, S., & Singer, R. (2006). Diamond single crystal growth in hot filament CVD. Diamond and Related Materials, 15(4-8), 536-541. https://dx.doi.org/10.1016/j.diamond.2006.01.003
Hirmke, J., Hempel, F., Stancu, G.D., Röpcke, J., Rosiwal, S., & Singer, R. (2006). Gas-phase characterization in diamond hot-filament CVD by infrared tunable diode laser absorption spectroscopy. Vacuum, 80(9), 967-976. https://dx.doi.org/10.1016/j.vacuum.2005.12.009
Glaser, A., Rosiwal, S., Freels, B., & Singer, R. (2004). Chemical vapor infiltration (CVI)-Part I: A new technique to achieve diamond composites. Diamond and Related Materials, 13, 834-838. https://dx.doi.org/10.1016/j.diamond.2003.10.041
Schwarz, S., Rottmair, C.A., Hirmke, J., Rosiwal, S., & Singer, R. (2004). CVD-diamond single-crystal growth. Journal of Crystal Growth, 271(3-4), 425-434. https://dx.doi.org/10.1016/j.jcrysgro.2004.08.003
Glaser, A., Rosiwal, S., & Singer, R. (2003). Herstellung neuartiger Substratwerkstoffe durch Infiltration mit Diamant aus der Gasphase. In H.-P. Degischer (Eds.), (pp. 325-330). Weinheim: Wiley-VCH.
Schwarz, S., Rosiwal, S., Frank, M., Breidt, D., & Singer, R. (2002). Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant. Diamond and Related Materials, 11, 589-595. https://dx.doi.org/10.1016/S0925-9635(01)00702-6

Last updated on 2018-15-10 at 12:05