Späth A (2023)
Publication Type: Conference contribution
Publication year: 2023
Publisher: American Institute of Physics Inc.
Book Volume: 2990
Conference Proceedings Title: AIP Conference Proceedings
Event location: Virtual, Online, TWN
DOI: 10.1063/5.0168274
Focused X-ray beam induced deposition is a recently developed approach for fabrication of metallic nanostructures by selective activation of metal-organic precursors with the focused beam of a scanning transmission soft X-ray microscope. While a proof-of-concept has been successfully achieved, the current setup requires fundamental improvements to be competitive with other nanolithography tools. Tools from theory of inventive problem solving have been applied for an in-depth analysis of potential improvements and to generate ideas for a next-level setup.
APA:
Späth, A. (2023). Progress in soft x-ray nanolithography by advanced tools of inventive problem solving. In Tzu-Hung Chuang, Bi-Hsuan Lin, Hung-Wei Shiu, Der-Hsin Wei (Eds.), AIP Conference Proceedings. Virtual, Online, TWN: American Institute of Physics Inc..
MLA:
Späth, Andreas. "Progress in soft x-ray nanolithography by advanced tools of inventive problem solving." Proceedings of the 15th International Conference on X-ray Microscopy, XRM 2022, Virtual, Online, TWN Ed. Tzu-Hung Chuang, Bi-Hsuan Lin, Hung-Wei Shiu, Der-Hsin Wei, American Institute of Physics Inc., 2023.
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