TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements

Spende A, Sobel N, Lukas M, Zierold R, Riedl JC, Gura L, Schubert I, Moreno JMM, Nielsch K, Stuehn B, Hess C, Trautmann C, Toimil-Molares ME (2015)

Publication Type: Journal article

Publication year: 2015

Journal

Nanotechnology Institute of Physics: Hybrid Open Access

Book Volume: 26

Article Number: 335301

Journal Issue: 33

DOI: 10.1088/0957-4484/26/33/335301

Abstract

Low-temperature atomic layer deposition (ALD) of TiO2, SiO2, and Al2O3 was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18-55 nm) and film thicknesses (5-22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.

Involved external institutions

GSI Helmholtzzentrum für Schwerionenforschung GmbH DE Germany (DE) Technische Universität Darmstadt DE Germany (DE) Universität Hamburg (UHH) DE Germany (DE)

How to cite

APA:

Spende, A., Sobel, N., Lukas, M., Zierold, R., Riedl, J.C., Gura, L.,... Toimil-Molares, M.E. (2015). TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. Nanotechnology, 26(33). https://doi.org/10.1088/0957-4484/26/33/335301

MLA:

Spende, Anne, et al. "TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements." Nanotechnology 26.33 (2015).

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