Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction

Espejo AP, Zierold R, Gooth J, Dendooven J, Detavernier C, Escrig J, Nielsch K (2016)

Publication Type: Journal article

Publication year: 2016

Journal

Nanotechnology Institute of Physics: Hybrid Open Access

Book Volume: 27

Article Number: 345707

Journal Issue: 34

DOI: 10.1088/0957-4484/27/34/345707

Abstract

Nickel-rich NiFe thin films (Ni92Fe8, Ni89Fe11 and Ni83Fe17) were prepared by combining atomic layer deposition (ALD) with a subsequent thermal reduction process. In order to obtain Ni x Fe1-xO y films, one ALD supercycle was performed according to the following sequence: m NiCp2/O3, with m = 1, 2 or 3, followed by one FeCp2/O3 cycle. The supercycle was repeated n times. The thermal reduction process in hydrogen atmosphere was investigated by in situ x-ray diffraction studies as a function of temperature. The metallic nickel iron alloy thin films were investigated and characterized with respect to crystallinity, morphology, resistivity, and magnetism. As proof-of-concept magnetic properties of an array of Ni83Fe17, close to the perfect Permalloy stoichiometry, nanotubes and an isolated tube were investigated.

Involved external institutions

Universidad de Chile CL Chile (CL) Universität Hamburg (UHH) DE Germany (DE) Universiteit Gent (UGent) / Ghent University BE Belgium (BE)

How to cite

APA:

Espejo, A.P., Zierold, R., Gooth, J., Dendooven, J., Detavernier, C., Escrig, J., & Nielsch, K. (2016). Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction. Nanotechnology, 27(34). https://doi.org/10.1088/0957-4484/27/34/345707

MLA:

Espejo, A. P., et al. "Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction." Nanotechnology 27.34 (2016).

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