Quality and parameter control of X-ray absorption gratings by angular X-ray transmission

Gustschin N, Gustschin A, Meyer P, Viermetz M, Riederer P, Herzen J, Mohr J, Pfeiffer F (2019)

Publication Type: Journal article

Publication year: 2019

Journal

Optics Express Optical Society of America

Book Volume: 27

Pages Range: 15943-15955

Journal Issue: 11

DOI: 10.1364/OE.27.015943

Abstract

Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing an entire grating interferometer. In addition to the local and surface-based analysis using a scanning electron microscope, our non-destructive method provides global averaged macroscopic and spatially resolved grating structure information without the requirement of resolving individual grating lines.

Involved external institutions

Technische Universität München (TUM) DE Germany (DE) Karlsruhe Institute of Technology (KIT) DE Germany (DE)

How to cite

APA:

Gustschin, N., Gustschin, A., Meyer, P., Viermetz, M., Riederer, P., Herzen, J.,... Pfeiffer, F. (2019). Quality and parameter control of X-ray absorption gratings by angular X-ray transmission. Optics Express, 27(11), 15943-15955. https://doi.org/10.1364/OE.27.015943

MLA:

Gustschin, Nikolai, et al. "Quality and parameter control of X-ray absorption gratings by angular X-ray transmission." Optics Express 27.11 (2019): 15943-15955.

BibTeX: Download