Fabrication of X-ray absorption gratings via deep X-ray lithography using a conventional X-ray tube

Pinzek S, Beckenbach T, Viermetz M, Meyer P, Gustschin A, Andrejewski J, Gustschin N, Herzen J, Schulz J, Pfeiffer F (2021)

Publication Type: Journal article

Publication year: 2021

Journal

Journal of Micro-Nanolithography MEMS and MOEMS Society of Photo-optical Instrumentation Engineers (SPIE)

Book Volume: 20

Article Number: 043801

Journal Issue: 4

DOI: 10.1117/1.JMM.20.4.043801

Abstract

Background: X-ray grating interferometry is an emerging imaging technique that strongly relies on fine grating structures. A common method to fabricate compatible gratings is deep X-ray lithography (DXRL). Aim: To develop a method to fabricate grating structures by DXRL, which does not require a synchrotron source. Approach: The synchrotron source is replaced by a conventional X-ray tube. The fabrication process is adapted for the divergent beam by cylindrically bending mask and substrate. Results: A 10-μm period absorption grating with 80-μm-thick gold lamellae is successfully fabricated from an intermediate 110-μm high structured resist. This grating is characterized and implemented in a preclinical Talbot-Lau interferometer designed for medical thorax imaging. Conclusion: This approach can overcome the strong dependence on synchrotron facilities for the fabrication of gratings for X-ray grating interferometry. As X-ray tubes are more widely available, this is a cost-efficient and scalable alternative suitable for industrial production.

Involved external institutions

Technische Universität München (TUM) DE Germany (DE) Microworks GmbH DE Germany (DE) Karlsruhe Institute of Technology (KIT) DE Germany (DE)

How to cite

APA:

Pinzek, S., Beckenbach, T., Viermetz, M., Meyer, P., Gustschin, A., Andrejewski, J.,... Pfeiffer, F. (2021). Fabrication of X-ray absorption gratings via deep X-ray lithography using a conventional X-ray tube. Journal of Micro-Nanolithography MEMS and MOEMS, 20(4). https://doi.org/10.1117/1.JMM.20.4.043801

MLA:

Pinzek, Simon, et al. "Fabrication of X-ray absorption gratings via deep X-ray lithography using a conventional X-ray tube." Journal of Micro-Nanolithography MEMS and MOEMS 20.4 (2021).

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