Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode

Schaude J, Albrecht J, Klöpzig U, Gröschl AC, Hausotte T (2019)

Publication Language: English

Publication Type: Journal article, Online publication

Publication year: 2019

Journal

Technisches Messen Oldenbourg Verlag

Book Volume: 86

Pages Range: 12-16

Journal Issue: S1

DOI: 10.1515/teme-2019-0035

Open Access Link: https://doi.org/10.1515/teme-2019-0035

Abstract

This article presents a new tilting atomic forcemicroscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode.The AFM is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The whole setup is integrated into a nano measuring machine (NMM-1) and the metrological traceability of the piezoresistive cantilever is warranted by in situ calibration on the NMM-1. To demonstrate the capabilities of the tilting AFM, measurements were conducted on a step height standard.

Authors with CRIS profile

Janik Schaude Lehrstuhl für Fertigungsmesstechnik Ute Klöpzig Lehrstuhl für Fertigungsmesstechnik Andreas Christian Gröschl Lehrstuhl für Fertigungsmesstechnik Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

Related research project(s)

Traceable three-dimensional nanometrology (3DNano) Traceable three-dimensional nanometrology Oct. 1, 2016 - Sept. 30, 2019

How to cite

APA:

Schaude, J., Albrecht, J., Klöpzig, U., Gröschl, A.C., & Hausotte, T. (2019). Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode. Technisches Messen, 86(S1), 12-16. https://dx.doi.org/10.1515/teme-2019-0035

MLA:

Schaude, Janik, et al. "Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode." Technisches Messen 86.S1 (2019): 12-16.

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