Tribological properties of carbonized photoresist

Oechsner R, Kluge A, Frey L, Ryssel H (1991)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1991

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Pages Range: 793-797

DOI: 10.1016/0168-583X(91)95706-J

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Oechsner, R., Kluge, A., Frey, L., & Ryssel, H. (1991). Tribological properties of carbonized photoresist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 793-797. https://dx.doi.org/10.1016/0168-583X(91)95706-J

MLA:

Oechsner, Richard, et al. "Tribological properties of carbonized photoresist." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1991): 793-797.

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