Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition

Journal article


Publication Details

Author(s): TU F, Späth A, Drost M, Vollnhals F, Krick Calderon S, Fink R, Marbach H
Journal: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics
Publication year: 2017
Volume: 35
Journal issue: 3
ISSN: 2166-2754
eISSN: 0734-211X


Abstract

Focused soft X-ray beam induced deposition of metallic deposits from metal organic precursors is a promising novel technique for additive nanostructure fabrication. In the present work, the authors present a comparative study for deposition and in situ characterization of Co and Mn nanostructures in a scanning transmission x-ray microscope. The authors detect a significant selectivity of the deposition process with respect to the incident photon energy that arises from the enhanced x-ray absorption cross section of the precursor molecules for near-threshold excitation. This effect has been investigated for the L2,3-edges of the respective metal centers of two different precursor molecules as well as the N and O K-edges of the respective ligands. The authors find a photon-limited growth mode for deposition from cobalt tricarbonyl nitrosyl [Co(CO)3NO], while the process is precursor-limited for methylcyclopentadienyl manganese tricarbonyl [MeCpMn(CO)3] possibly due to a comparably low vapor pressure of the latter precursor.


FAU Authors / FAU Editors

Drost, Martin
Lehrstuhl für Physikalische Chemie II
Fink, Rainer Prof. Dr.
Professur für Physikalische Chemie
Krick Calderon, Sandra
Lehrstuhl für Physikalische Chemie II
Marbach, Hubertus PD Dr.
Lehrstuhl für Physikalische Chemie II
Späth, Andreas Dr.
Lehrstuhl für Physikalische Chemie II
TU, Fan
Lehrstuhl für Physikalische Chemie II
Vollnhals, Florian Dr.
Lehrstuhl für Physikalische Chemie II


Additional Organisation
Exzellenz-Cluster Engineering of Advanced Materials


Research Fields

D Catalytic Materials
Exzellenz-Cluster Engineering of Advanced Materials


How to cite

APA:
TU, F., Späth, A., Drost, M., Vollnhals, F., Krick Calderon, S., Fink, R., & Marbach, H. (2017). Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 35(3). https://dx.doi.org/10.1116/1.4979274

MLA:
TU, Fan, et al. "Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 35.3 (2017).

BibTeX: 

Last updated on 2019-18-07 at 07:13