Additive fabrication of nanostructures with focused soft X-rays

Journal article


Publication Details

Author(s): Späth A, Tu F, Vollnhals F, Drost M, Krick Calderon S, Watts B, Fink R, Marbach H
Journal: RSC Advances
Publication year: 2016
Volume: 6
Journal issue: 100
Pages range: 98344-98349
ISSN: 2046-2069


Abstract

We report on a novel technique for the fabrication of metallic nanostructures via soft X-ray irradiation of precursor molecules supplied from the gas phase. With this technique we were able to produce localized Co nanostructures with a growth rate and purity competitive with electron beam induced deposition. We demonstrate that our approach exhibits significant selectivity with respect to incident photon energy leading to enhanced growth for resonant absorption energy of the precursor molecule. Based on this finding we propose a unique new pathway of selective deposition from precursor mixtures. Furthermore, we investigated the growth rate with respect to precursor pressure and growth time and discuss the potential resolution limits of this new technique.


FAU Authors / FAU Editors

Drost, Martin
Lehrstuhl für Physikalische Chemie II
Fink, Rainer Prof. Dr.
Professur für Physikalische Chemie
Krick Calderon, Sandra
Lehrstuhl für Physikalische Chemie II
Marbach, Hubertus PD Dr.
Lehrstuhl für Physikalische Chemie II
Späth, Andreas Dr.
Lehrstuhl für Physikalische Chemie II
TU, Fan
Lehrstuhl für Physikalische Chemie II
Vollnhals, Florian Dr.
Lehrstuhl für Physikalische Chemie II


Additional Organisation
Exzellenz-Cluster Engineering of Advanced Materials


External institutions
Paul Scherrer Institute (PSI)


How to cite

APA:
Späth, A., Tu, F., Vollnhals, F., Drost, M., Krick Calderon, S., Watts, B.,... Marbach, H. (2016). Additive fabrication of nanostructures with focused soft X-rays. RSC Advances, 6(100), 98344-98349. https://dx.doi.org/10.1039/C6RA18214C

MLA:
Späth, Andreas, et al. "Additive fabrication of nanostructures with focused soft X-rays." RSC Advances 6.100 (2016): 98344-98349.

BibTeX: 

Last updated on 2019-15-03 at 09:08