Setup of an electron probe micro analyzer for highest resolution radioscopy

Hanke R, Nachtrab F, Burtzlaff S, Voland V, Uhlmann N, Porsch F, Johansson W (2009)


Publication Type: Journal article

Publication year: 2009

Journal

Book Volume: 607

Pages Range: 173-175

Journal Issue: 1

DOI: 10.1016/j.nima.2009.03.151

Abstract

Structural investigation and characterization of objects below the micrometer-scale level often require either big efforts in experimental setup and critical time schedules as is the case with synchrotron sources or a big effort in test object preparation including destructive methods (e.g. grinding) for the investigation within an electron microscope. The limiting factor for high-resolution imaging with conventional X-ray sources is the focal spot size of the X-ray tube used. Focal spot sizes down to 500~nm can be achieved with double-focusing X-ray tubes and transmission targets. To be able to use X-ray transmission imaging for structural investigation with highest resolution in everybody's laboratory, we modified an electron probe micro analyzer (EPMA) to be used as an X-ray source. With this it is possible to obtain electron beam diameters below 200~nm and to produce X-rays using a special transmission target. Due to the low X-ray intensity and in order to profit from the high magnification, a high-resolution, low-noise detector is to be used. We chose a Medipix2 detector for that purpose. We will present the setup and first results of radioscopic images with a resolution of about 240~nm.

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APA:

Hanke, R., Nachtrab, F., Burtzlaff, S., Voland, V., Uhlmann, N., Porsch, F., & Johansson, W. (2009). Setup of an electron probe micro analyzer for highest resolution radioscopy. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 607(1), 173-175. https://dx.doi.org/10.1016/j.nima.2009.03.151

MLA:

Hanke, R., et al. "Setup of an electron probe micro analyzer for highest resolution radioscopy." Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 607.1 (2009): 173-175.

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