Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

Journal article


Publication Details

Author(s): TU F, Drost M, Szenti I, Kiss J, Konya Z, Marbach H
Journal: Beilstein Journal of Nanotechnology
Publication year: 2017
Volume: 8
Pages range: 2592-2605
ISSN: 2190-4286


Abstract

We report on the fabrication of carbon nanotubes (CNTs) at predefined positions and controlled morphology, for example, as individual nanotubes or as CNT forests. Electron beam induced deposition (EBID) with subsequent autocatalytic growth (AG) was applied to lithographically produce catalytically active seeds for the localized growth of CNTs via chemical vapor deposition (CVD). With the precursor Fe(CO)5 we were able to fabricate clean iron deposits via EBID and AG. After the proof-of-principle that these Fe deposits indeed act as seeds for the growth of CNTs, the influence of significant EBID/AG parameters on the deposit shape and finally the yield and morphology of the grown CNTs was investigated in detail. Based on these results, the parameters could be optimized such that EBID point matrixes (6 $\times$ 6) were fabricated on a silica surface whereby at each predefined site only one CNT was produced. Furthermore, the localized fabrication of CNT forests was targeted and successfully achieved on an Al2O3 layer on a silicon sample. A peculiar lift-up of the Fe seed structures as \dqflakes\dq was observed and the mechanism was discussed. Finally, a proof-of-principle was presented showing that EBID deposits from the precursor Co(CO)3NO are also very effective catalysts for the CNT growth. Even though the metal content (Co) of the latter is reduced in comparison to the Fe deposits, effective CNT growth was observed for the Co-containing deposits at lower CVD temperatures than for the corresponding Fe deposits.


FAU Authors / FAU Editors

Drost, Martin
Lehrstuhl für Physikalische Chemie II
Marbach, Hubertus PD Dr.
Lehrstuhl für Physikalische Chemie II
TU, Fan
Lehrstuhl für Physikalische Chemie II


Additional Organisation
Exzellenz-Cluster Engineering of Advanced Materials


External institutions with authors

University of Szeged / József Attila Tudományegyetem Szeged


Research Fields

D Catalytic Materials
Exzellenz-Cluster Engineering of Advanced Materials


How to cite

APA:
TU, F., Drost, M., Szenti, I., Kiss, J., Konya, Z., & Marbach, H. (2017). Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits. Beilstein Journal of Nanotechnology, 8, 2592-2605. https://dx.doi.org/10.3762/bjnano.8.260

MLA:
TU, Fan, et al. "Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits." Beilstein Journal of Nanotechnology 8 (2017): 2592-2605.

BibTeX: 

Last updated on 2019-18-07 at 07:11