On the Principles of Tweaking Nanostructure Fabrication via Focused Electron Beam Induced Processing Combined with Catalytic Growth Processes

Journal article


Publication Details

Author(s): Drost M, TU F, Vollnhals F, Szenti I, Kiss J, Marbach H
Journal: Small Methods
Publication year: 2017
Volume: 1
Journal issue: 6
ISSN: 2366-9608


Abstract

Novel pathways to use a focused electron beam in ultrahigh vacuum in combination with catalytic growth protocols are explored for the fabrication of well-defined nanostructures. Thereby, the basic process is the local deposition of material from different precursor molecules (Co(CO)3 NO, Fe(CO)5). This can be realized with a focused electron beam by direct deposition of the precursor or by a chemical modification of the substrate, such that it becomes activated toward the decomposition of the precursor. For both methods, autocatalytic growth (AG) processes can occur, yielding the deposition of additional material. Interestingly, significantly different chemical selectivities for the two precursors are found, which can drastically change upon subtle changes of the surface. It is demonstrated that AG can be tweaked by the choice of the substrate/precursor combination. One possibility to quench catalytic activity of a substrate is the preparation of a thin layer of organic molecules, here porphyrins, which enables the fabrication of hybrid metal--organic nanostructures with line widths below 20 nm. Based on these findings, corresponding techniques are developed which exploit (auto)catalytic effects for the controlled fabrication of nanostructures. These results indicate that every substrate is applicable to electron beam induced surface activation by preparation of a thin porphyrin layer.


FAU Authors / FAU Editors

Drost, Martin
Lehrstuhl für Physikalische Chemie II
Marbach, Hubertus PD Dr.
Lehrstuhl für Physikalische Chemie II
TU, Fan
Lehrstuhl für Physikalische Chemie II
Vollnhals, Florian Dr.
Lehrstuhl für Physikalische Chemie II


Additional Organisation
Exzellenz-Cluster Engineering of Advanced Materials


External institutions with authors

University of Szeged / József Attila Tudományegyetem Szeged


Research Fields

D Catalytic Materials
Exzellenz-Cluster Engineering of Advanced Materials


How to cite

APA:
Drost, M., TU, F., Vollnhals, F., Szenti, I., Kiss, J., & Marbach, H. (2017). On the Principles of Tweaking Nanostructure Fabrication via Focused Electron Beam Induced Processing Combined with Catalytic Growth Processes. Small Methods, 1(6). https://dx.doi.org/10.1002/smtd.201700095

MLA:
Drost, Martin, et al. "On the Principles of Tweaking Nanostructure Fabrication via Focused Electron Beam Induced Processing Combined with Catalytic Growth Processes." Small Methods 1.6 (2017).

BibTeX: 

Last updated on 2019-25-03 at 10:23