Interpreting Atom Probe Data from Oxide-Metal Interfaces

Journal article


Publication Details

Author(s): Mccarroll I, Scherrer B, Felfer P, Moody MP, Cairney JM
Journal: Microscopy and Microanalysis
Publisher: CAMBRIDGE UNIV PRESS
Publication year: 2018
Volume: 24
Journal issue: 4
Pages range: 342-349
ISSN: 1431-9276


Abstract

Understanding oxide-metal interfaces is crucial to the advancement of materials and components for many industries, most notably for semiconductor devices and power generation. Atom probe tomography provides three-dimensional, atomic scale information about chemical composition, making it an excellent technique for interface analysis. However, difficulties arise when analyzing interfacial regions due to trajectory aberrations, such as local magnification, and reconstruction artifacts. Correlative microscopy and field simulation techniques have revealed that nonuniform evolution of the tip geometry, caused by heterogeneous field evaporation, is partly responsible for these artifacts. Here we attempt to understand these trajectory artifacts through a study of the local evaporation field conditions. With a better understanding of the local evaporation field, it may be possible to account for some of the local magnification effects during the reconstruction process, eliminating these artifacts before data analysis.


FAU Authors / FAU Editors

Felfer, Peter Prof. Dr.
Juniorprofessor für Werkstoffwissenschaften (3D-Nanoanalytik und Atomsondenmikroskopie)


External institutions
Technion - Israel Institute of Technology
University of Oxford
University of Sydney


How to cite

APA:
Mccarroll, I., Scherrer, B., Felfer, P., Moody, M.P., & Cairney, J.M. (2018). Interpreting Atom Probe Data from Oxide-Metal Interfaces. Microscopy and Microanalysis, 24(4), 342-349. https://dx.doi.org/10.1017/S1431927618012370

MLA:
Mccarroll, Ingrid, et al. "Interpreting Atom Probe Data from Oxide-Metal Interfaces." Microscopy and Microanalysis 24.4 (2018): 342-349.

BibTeX: 

Last updated on 2019-11-02 at 16:08