An improved method for point deflection measurements on rectangular membranes

Journal article


Publication Details

Author(s): Merle B, Nicholson KS, Herbert EG, Göken M
Journal: Materials and Design
Publisher: ELSEVIER SCI LTD
Publication year: 2016
Volume: 109
Pages range: 485-491
ISSN: 0264-1275


Abstract

In this work, the recent theoretical advances for evaluating point deflection experiments are reviewed and further refined. An improved experimental approach based on measuring the contact stiffness during nanoindentation is implemented and applied to the evaluation of the residual stress in SiNx and gold membranes. The accuracy of the point deflection experiments is assessed by evaluating the same set of samples with the bulge test reference technique and comparing the residual stress results. It is shown that the new experimental method greatly improves the reproducibility of the measurement and that the updated evaluation scheme leads to a more reliable residual stress value. (C) 2016 Elsevier Ltd. All rights reserved.


FAU Authors / FAU Editors

Göken, Mathias Prof. Dr.
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)
Merle, Benoit PD Dr. habil.
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)


Additional Organisation
Exzellenz-Cluster Engineering of Advanced Materials
Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM)


External institutions with authors

Michigan Technological University


Research Fields

A2 Nanoanalysis and Microscopy
Exzellenz-Cluster Engineering of Advanced Materials


How to cite

APA:
Merle, B., Nicholson, K.S., Herbert, E.G., & Göken, M. (2016). An improved method for point deflection measurements on rectangular membranes. Materials and Design, 109, 485-491. https://dx.doi.org/10.1016/j.matdes.2016.07.054

MLA:
Merle, Benoit, et al. "An improved method for point deflection measurements on rectangular membranes." Materials and Design 109 (2016): 485-491.

BibTeX: 

Last updated on 2019-28-05 at 13:37