Synchrotron x-ray microdiffraction study of residual stresses in BaTiO3 films deposited at room temperature by aerosol deposition

Khansur NH, Eckstein U, Rieß K, Martin A, Drnec J, Deisinger U, Webber KG (2018)

Publication Language: English

Publication Status: Published

Publication Type: Journal article

Publication year: 2018

Journal

Publisher: PERGAMON-ELSEVIER SCIENCE LTD

Book Volume: 157

Pages Range: 86-89

DOI: 10.1016/j.scriptamat.2018.07.045

Abstract

The residual stress through the thickness of a BaTiO3 ceramic film deposited on steel substrate at room temperature with aerosol deposition has been analyzed using synchrotron x-ray microdiffraction. A gradient in stress distribution was evident through the film and the maximum biaxial compressive stress of -800 MPa was observed at the film-substrate interface. Heat-treatment was found to relax the internal compressive stress, due to thermal expansion mismatch between the film and substrate. Variation in ferroelectric response was correlated to the change in stress state by thermal treatment. This analysis is crucial for development of micro-and nanoelectronic devices with AD films. (C) 2018 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Authors with CRIS profile

Involved external institutions

CeramTec GmbH Germany (DE) European Synchrotron Radiation Facility (ESRF) France (FR)

How to cite

APA:

Khansur, N.H., Eckstein, U., Rieß, K., Martin, A., Drnec, J., Deisinger, U., & Webber, K.G. (2018). Synchrotron x-ray microdiffraction study of residual stresses in BaTiO3 films deposited at room temperature by aerosol deposition. Scripta Materialia, 157, 86-89. https://dx.doi.org/10.1016/j.scriptamat.2018.07.045

MLA:

Khansur, Neamul Hayet, et al. "Synchrotron x-ray microdiffraction study of residual stresses in BaTiO3 films deposited at room temperature by aerosol deposition." Scripta Materialia 157 (2018): 86-89.

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