Stress reduction in high voltage MIS capacitor fabrication

Banzhaf S, Kenntner J, Grieb M, Schwaiger S, Erlbacher T, Bauer AJ, Frey L (2017)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2017

Publisher: Institute of Electrical and Electronics Engineers Inc.

Pages Range: 1-6

ISBN: 9781538635018

DOI: 10.1109/PEE.2017.8171664

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Robert Bosch GmbH DE Germany (DE) Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Banzhaf, S., Kenntner, J., Grieb, M., Schwaiger, S., Erlbacher, T., Bauer, A.J., & Frey, L. (2017). Stress reduction in high voltage MIS capacitor fabrication. In Proceedings of the 19th International Symposium on Power Electronics, Ee 2017 (pp. 1-6). Institute of Electrical and Electronics Engineers Inc..

MLA:

Banzhaf, S., et al. "Stress reduction in high voltage MIS capacitor fabrication." Proceedings of the 19th International Symposium on Power Electronics, Ee 2017 Institute of Electrical and Electronics Engineers Inc., 2017. 1-6.

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