Hausotte T, Gröschl AC, Schaude J (2018)
Publication Type: Journal article, Review article
Publication year: 2018
Book Volume: Vol. 57
Pages Range: 3907-3914
Journal Issue: Issue 14
DOI: 10.1364/AO.57.003907
Open Access Link: https://www.osapublishing.org/ao/abstract.cfm?uri=ao-57-14-3907
This article presents a new robust, precise, high-frequency focal-distance-modulated confocal point sensor for probing in coordinate measuring systems (CMSs). While maintaining the known advantages of the confocal measurement principle, the sensor represents an innovative combination of a fiber-coupled confocal illumination and detection with a tuneable, acoustically driven gradient-index fluid lens for modulation of the focus distance and a novel signal processing utilizing a lock-in amplifier. The new arrangement is able to achieve an approximately linear characteristic curve for the optimized feedback control of the CMS in scanning sample mode. This article emphasizes the optical application and the signal processing of the setup.
APA:
Hausotte, T., Gröschl, A.C., & Schaude, J. (2018). High-speed focal-distance-modulated fiber-coupled confocal sensor for coordinate measuring systems. Applied Optics, Vol. 57(Issue 14), 3907-3914. https://dx.doi.org/10.1364/AO.57.003907
MLA:
Hausotte, Tino, Andreas Christian Gröschl, and Janik Schaude. "High-speed focal-distance-modulated fiber-coupled confocal sensor for coordinate measuring systems." Applied Optics Vol. 57.Issue 14 (2018): 3907-3914.
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