Lipp S, Frey L, Franz G, Demm E, Petersen S, Ryssel H (1995)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 1995
Book Volume: 106
Pages Range: 630-635
DOI: 10.1016/0168-583X(95)00778-4
APA:
Lipp, S., Frey, L., Franz, G., Demm, E., Petersen, S., & Ryssel, H. (1995). Local material removal by focused ion beam milling and etching. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 106, 630-635. https://dx.doi.org/10.1016/0168-583X(95)00778-4
MLA:
Lipp, S., et al. "Local material removal by focused ion beam milling and etching." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 (1995): 630-635.
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