A novel delineation technique for 2D-profiling of dopants in crystalline silicon

Gong L, Frey L, Bogen S, Ryssel H (1993)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1993

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Book Volume: 74

Pages Range: 186-190

DOI: 10.1016/0168-583X(93)95040-C

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Gong, L., Frey, L., Bogen, S., & Ryssel, H. (1993). A novel delineation technique for 2D-profiling of dopants in crystalline silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74, 186-190. https://dx.doi.org/10.1016/0168-583X(93)95040-C

MLA:

Gong, Li, et al. "A novel delineation technique for 2D-profiling of dopants in crystalline silicon." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 74 (1993): 186-190.

BibTeX: Download